Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027427 | Preheat processes for millisecond anneal system | Markus Lieberer, Christian Pfahler, Markus Hagedorn, Alexandr Cosceev | 2024-07-02 |
| 10727140 | Preheat processes for millisecond anneal system | Markus Lieberer, Christian Pfahler, Markus Hagedorn, Alexandr Cosceev | 2020-07-28 |