Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11392048 | Exposure apparatus, flat panel display manufacturing method, and device manufacturing method | — | 2022-07-19 |
| 11187987 | Exposure apparatus and exposure method, and flat panel display manufacturing method | Takashi Shibuya | 2021-11-30 |
| 11169448 | Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method | — | 2021-11-09 |
| 11086236 | Exposure apparatus and exposure method, and flat panel display manufacturing method | Takashi Shibuya | 2021-08-10 |
| 10732517 | Exposure apparatus and exposure method, and flat panel display manufacturing method | Takashi Shibuya | 2020-08-04 |
| 10732510 | Exposure apparatus and exposure method, and flat panel display manufacturing method | Takashi Shibuya | 2020-08-04 |
| 10656529 | Exposure apparatus and exposure method, and flat panel display manufacturing method | Takashi Shibuya | 2020-05-19 |
| 10444642 | Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method | — | 2019-10-15 |
| 10268121 | Exposure apparatus and exposure method, and flat panel display manufacturing method | Takashi Shibuya | 2019-04-23 |
| 10048600 | Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method | — | 2018-08-14 |
| 8349525 | Protective apparatus, mask, mask fabricating method and conveying apparatus, and exposure apparatus | Noritsugu Hanazaki | 2013-01-08 |
| 6366341 | Exposure method and exposure apparatus | Kazuhiko Hori, Toshio Matsuura | 2002-04-02 |