Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354839 | Radio-frequency antenna and plasma processing device | Hajime Tsuda, Hideki Moriuchi | 2025-07-08 |
| 11785701 | Plasma generator | — | 2023-10-10 |
| 9078336 | Radio-frequency antenna unit and plasma processing apparatus | Yuichi Setsuhara | 2015-07-07 |
| 8931433 | Plasma processing apparatus | Yuichi Setsuhara, Eiji Ino, Shinichiro Ishihara, Hajime Ashida, Akira Watanabe | 2015-01-13 |
| 8916034 | Thin-film forming sputtering system | Yuichi Setsuhara, Jeon Geon Han | 2014-12-23 |
| 8917022 | Plasma generation device and plasma processing device | Yasunori Ando, Masanori Watanabe | 2014-12-23 |
| 8444806 | Plasma generator, plasma control method and method of producing substrate | Shoji Miyake, Tatsuo Shoji, Yuichi Setsuhara | 2013-05-21 |
| 7880392 | Plasma producing method and apparatus as well as plasma processing apparatus | Kenji Kato, Hiroshige Deguchi, Hitoshi Yoneda, Kiyoshi Kubota, Yuichi Setsuhara | 2011-02-01 |
| 7785441 | Plasma generator, plasma control method, and method of producing substrate | Shoji Miyake, Tatsuo Shoji, Yuichi Setsuhara | 2010-08-31 |
| 6620247 | Thin polycrystalline silicon film forming apparatus | Naoto Kuratani, Eiji Takahashi | 2003-09-16 |
| 6447850 | Polycrystalline silicon thin film forming method | Naoto Kuratani, Eiji Takahashi | 2002-09-10 |
| 6294479 | Film forming method and apparatus | Satoshi Nishiyama, Kiyoshi Ogata, Yasuo Suzuki | 2001-09-25 |
| 6103321 | Method of manufacturing an ultraviolet resistant object | Yasushi Fujinami, Osamu Imai, Kiyoshi Ogata | 2000-08-15 |
| 5501911 | Copper crystal film coated organic substrate | Kiyoshi Ogata, Satoshi Nishiyama, Naoto Kuratani, Taizo Okazaki | 1996-03-26 |
| 5496772 | Method of manufacturing film carrier type substrate | Kiyoshi Ogata, Satoshi Nishiyama | 1996-03-05 |
| 5316802 | Method of forming copper film on substrate | Kiyoshi Ogata, Satoshi Nishiyama, Naoto Kuratani, Taizo Okazaki | 1994-05-31 |