Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7754282 | Adjusting a spacing between a gas distribution member and a substrate support | Kirby H. Floyd, Jennifer Gonzales, Won Bae Bang, Rong Pan, Amna Mohammed +1 more | 2010-07-13 |
| 7413612 | In situ substrate holder leveling method and apparatus | Kirby H. Floyd, Jennifer Gonzales, Won Bae Bang, Rong Pan, Amna Mohammed +1 more | 2008-08-19 |