Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847368 | EUV resist patterning using pulsed plasma | Byungkook Kong, Sangwook Kim, Seunghyun Park, Kyoungjin LEE, Daksh Agarwal | 2020-11-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847368 | EUV resist patterning using pulsed plasma | Byungkook Kong, Sangwook Kim, Seunghyun Park, Kyoungjin LEE, Daksh Agarwal | 2020-11-24 |