Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9602026 | Temperature compensation for MEMS devices | Emmanuel P. Quevy | 2017-03-21 |
| 9376312 | Method for fabricating a transducer apparatus | Anthony Flannery | 2016-06-28 |
| 9377487 | Transducer structure and method for MEMS devices | Sudheer S. Sridharamurthy | 2016-06-28 |
| 9321629 | Method and structure for adding mass with stress isolation to MEMS structures | — | 2016-04-26 |
| 9300227 | Monolithic body MEMS devices | Emmanuel P. Quevy | 2016-03-29 |
| 9246412 | Suspended passive element for MEMS devices | Emmanuel P. Quevy | 2016-01-26 |
| 8710597 | Method and structure for adding mass with stress isolation to MEMS structures | — | 2014-04-29 |
| 8564075 | Package tolerate design and method | — | 2013-10-22 |
| 8553389 | Anchor design and method for MEMS transducer apparatuses | Anthony Flannery | 2013-10-08 |
| 8477473 | Transducer structure and method for MEMS devices | Sudheer S. Sridharamurthy | 2013-07-02 |
| 8056415 | Semiconductor device with reduced sensitivity to package stress | Andrew C. McNeil, Aaron A. Geisberger, Gary Li | 2011-11-15 |
| 7829366 | Microelectromechanical systems component and method of making same | Melvy F. Miller, Lianjun Liu | 2010-11-09 |
| 7637160 | MEMS suspension and anchoring design | Andrew C. McNeil | 2009-12-29 |
| 7628072 | MEMS device and method of reducing stiction in a MEMS device | Andrew C. McNeil | 2009-12-08 |
| 7268463 | Stress release mechanism in MEMS device and method of making same | Gary Li, Jonathan Hale Hammond | 2007-09-11 |
| 6936492 | Single proof mass, 3 axis MEMS transducer | Andrew C. McNeil, Gary Li | 2005-08-30 |
| 6845670 | Single proof mass, 3 axis MEMS transducer | Andrew C. McNeil, Gary Li | 2005-01-25 |
| 6465320 | Electronic component and method of manufacturing | Andrew C. McNeil, Bishnu Prasanna Gogoi | 2002-10-15 |
| 6228275 | Method of manufacturing a sensor | Daniel J. Koch, Jonathan Hale Hammond, Jonathan Gorrell | 2001-05-08 |
| 6122963 | Electronic component for measuring acceleration | Jonathan Hale Hammond, Richard J. August, Andrew C. McNeil | 2000-09-26 |
| 6018998 | Acceleration sensing device and method of operation and forming | Helen M. Zunino | 2000-02-01 |
| 5914521 | Sensor devices having a movable structure | Ronald J. Gutteridge, Daniel J. Koch, Jonathan Hale Hammond | 1999-06-22 |
| 5806365 | Acceleration sensing device on a support substrate and method of operation | Helen M. Zunino | 1998-09-15 |
| 4876212 | Process for fabricating complimentary semiconductor devices having pedestal structures | — | 1989-10-24 |
| 4757029 | Method of making vertical field effect transistor with plurality of gate input cnnections | — | 1988-07-12 |