Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6535779 | Apparatus and method for endpoint control and plasma monitoring | Manush Birang, Terry Doyle, Nils Johansson, Paul Luscher, Leonid Poslavsky | 2003-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6535779 | Apparatus and method for endpoint control and plasma monitoring | Manush Birang, Terry Doyle, Nils Johansson, Paul Luscher, Leonid Poslavsky | 2003-03-18 |