Issued Patents All Time
Showing 51–75 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9296606 | MEMS device with a stress-isolation structure | Kirt Williams, Matthew Julian Thompson | 2016-03-29 |
| 9221676 | Internal electrical contact for enclosed MEMS devices | Kegang Huang, Jongwoo Shin, Martin Lim, Michael Julian Daneman | 2015-12-29 |
| 9170107 | Micromachined gyroscope including a guided mass system | Ozan Anac | 2015-10-27 |
| 9097524 | MEMS device with improved spring system | Ozan Anac | 2015-08-04 |
| 9086730 | Selectable communication interface configurations for motion sensing device | Behrad Aria, David Sachs | 2015-07-21 |
| 9052194 | Extension-mode angular velocity sensor | Bruno Borovic | 2015-06-09 |
| 9006832 | High-voltage MEMS apparatus and method | Derek K. Shaeffer, Baris Cagdaser | 2015-04-14 |
| 8960002 | Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics | Steven S. Nasiri, Goksen G. Yaralioglu, Babak Taheri | 2015-02-24 |
| 8947081 | Micromachined resonant magnetic field sensors | Chiung C. Lo, Baris Cagdaser, Derek K. Shaeffer | 2015-02-03 |
| 8945969 | Internal electrical contact for enclosed MEMS devices | Kegang Huang, Jongwoo Shin, Martin Lim, Michael Julian Daneman | 2015-02-03 |
| 8860409 | Micromachined resonant magnetic field sensors | Chiung C. Lo, Baris Cagdaser, Derek K. Shaeffer | 2014-10-14 |
| 8847693 | Method and system for using a MEMS structure as a timing source | Goksen G. Yaralioglu, Baris Cagdaser | 2014-09-30 |
| 8833162 | Micromachined gyroscope including a guided mass system | Ozan Anac | 2014-09-16 |
| 8822252 | Internal electrical contact for enclosed MEMS devices | Kegang Huang, Jongwoo Shin, Martin Lim, Michael Julian Daneman | 2014-09-02 |
| 8567246 | Integrated MEMS device and method of use | Derek K. Shaeffer, Baris Cagdaser, Chiung C. Lo | 2013-10-29 |
| 8564076 | Internal electrical contact for enclosed MEMS devices | Kegang Huang, Jongwoo Shin, Martin Lim, Michael Julian Daneman | 2013-10-22 |
| 8539835 | Low inertia frame for detecting coriolis acceleration | Bruno Borovic | 2013-09-24 |
| 8534127 | Extension-mode angular velocity sensor | Bruno Borovic | 2013-09-17 |
| 8395381 | Micromachined magnetic field sensors | Chiung C. Lo, Martin Lim | 2013-03-12 |
| 8347717 | Extension-mode angular velocity sensor | Bruno Borovic | 2013-01-08 |
| 8310380 | Selectable communication interface configurations for motion sensing device | Behrad Aria, David Sachs | 2012-11-13 |
| 8183944 | Method and system for using a MEMS structure as a timing source | Goksen G. Yaralioglu, Baris Cagdaser | 2012-05-22 |
| 8141424 | Low inertia frame for detecting coriolis acceleration | Bruno Borovic | 2012-03-27 |
| 8069726 | X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging | Steven S. Nasiri, Alexander Castro | 2011-12-06 |
| 8047075 | Vertically integrated 3-axis MEMS accelerometer with electronics | Steven S. Nasiri, Goksen G. Yaralioglu | 2011-11-01 |