Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8486727 | System and method for step coverage measurement | Hanhong Chen, Pragati Kumar | 2013-07-16 |
| 8278735 | Yttrium and titanium high-k dielectric films | Imran Hashim, Indranil De, Tony P. Chiang, Hanhong Chen, Nobi Fuchigami +3 more | 2012-10-02 |
| 7968452 | Titanium-based high-K dielectric films | Hanhong Chen, Pragati Kumar, Sunil Shanker, Sandra G. Malhotra, Imran Hashim +3 more | 2011-06-28 |
| 7927947 | Methods for depositing high-K dielectrics | Xiangxin Rui, Sunil Shanker, Sandra G. Malhotra, Imran Hashim | 2011-04-19 |