Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6069739 | Method and lens arrangement to improve imaging performance of microlithography exposure tool | Christof Krautschik | 2000-05-30 |
| 6021009 | Method and apparatus to improve across field dimensional control in a microlithography tool | Patrick M. Troccolo | 2000-02-01 |
| 5946079 | Photolithography method using coherence distance control | — | 1999-08-31 |
| 5840448 | Phase shifting mask having a phase shift that minimizes critical dimension sensitivity to manufacturing and process variance | Vivek Singh | 1998-11-24 |
| 5801821 | Photolithography method using coherence distance control | — | 1998-09-01 |
| 5532090 | Method and apparatus for enhanced contact and via lithography | — | 1996-07-02 |
| 5498579 | Method of producing semiconductor device layer layout | Ananda Sarangi | 1996-03-12 |
| 5424154 | Lithographic emhancement method and apparatus for randomly spaced structures | — | 1995-06-13 |
| 4767215 | Lens characterization apparatus and method | — | 1988-08-30 |
| 4672420 | Integrated circuit structure having conductive, protective layer for multilayer metallization to permit reworking | Mammen Thomas, Danny Ma | 1987-06-09 |
| 4580332 | Forming a conductive, protective layer for multilayer metallization | — | 1986-04-08 |
| 4529685 | Method for making integrated circuit devices using a layer of indium arsenide as an antireflective coating | — | 1985-07-16 |