Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6208748 | Monitoring focus of a lens imaging system based on astigmatism | Andrew Grenville | 2001-03-27 | $117,605,000 |
| 6051344 | Multiple reduction photolithography technique | Joseph C. Langston | 2000-04-18 | $334,401,000 |
| 6021009 | Method and apparatus to improve across field dimensional control in a microlithography tool | Yan Borodovsky | 2000-02-01 | $155,838,000 |
| 5935733 | Photolithography mask and method of fabrication | Charles Scott | 1999-08-10 | $109,908,000 |
| 5795684 | Photolithography mask and method of fabrication | — | 1998-08-18 | $76,383,000 |