Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6208748 | Monitoring focus of a lens imaging system based on astigmatism | Andrew Grenville | 2001-03-27 |
| 6051344 | Multiple reduction photolithography technique | Joseph C. Langston | 2000-04-18 |
| 6021009 | Method and apparatus to improve across field dimensional control in a microlithography tool | Yan Borodovsky | 2000-02-01 |
| 5935733 | Photolithography mask and method of fabrication | Charles Scott | 1999-08-10 |
| 5795684 | Photolithography mask and method of fabrication | — | 1998-08-18 |