Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7790631 | Selective deposition of a dielectric on a self-assembled monolayer-adsorbed metal | Ajay Sharma, Dennis G. Hanken, Andrew Ott | 2010-09-07 |
| 7759262 | Selective formation of dielectric etch stop layers | Jason W. Klaus | 2010-07-20 |
| 7291552 | Multi-layer film stack for extinction of substrate reflections during patterning | Sanjay Natarajan, Khaled Elamrawi | 2007-11-06 |
| 7199473 | Integrated low-k hard mask | Andrew Ott | 2007-04-03 |
| 7172960 | Multi-layer film stack for extinction of substrate reflections during patterning | Sanjay Natarajan, Khaled Elamrawi | 2007-02-06 |
| 6974772 | Integrated low-k hard mask | Andrew Ott | 2005-12-13 |
| 6761625 | Reclaiming virgin test wafers | Hossein Rojhantalab, Chi-Hwa Tsang | 2004-07-13 |