Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6083089 | Method and apparatus for chemical mechanical polishing | Joseph R. Breivogel, Christopher E. Barns | 2000-07-04 |
| 5635083 | Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate | Joseph R. Breivogel, Christopher E. Barns | 1997-06-03 |
| 5216843 | Polishing pad conditioning apparatus for wafer planarization process | Joseph R. Breivogel, Loren R. Blanchard | 1993-06-08 |