Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7116034 | Structure to achieve high-Q and low insertion loss film bulk acoustic resonators | Oing Ma, Valluri Rao | 2006-10-03 |
| 7109826 | Tapered electrode in an acoustic resonator | Eyal Ginsburg, Alexander Talalyevsky, Eyal Bar-Sadeh, Doron Rubin | 2006-09-19 |
| 7057477 | Integration of FBAR filter(s) and on-chip inductors | — | 2006-06-06 |
| 6975184 | Adjusting the frequency of film bulk acoustic resonators | Michael DiBattista, Seth A. Fortuna, Qing Ma, Valluri Rao | 2005-12-13 |
| 6967548 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, Valluri Rao, John Heck, Dong-sik Shim, Quan Tran | 2005-11-22 |
| 6949268 | Frequency uniformity of film bulk acoustic resonators | Dong-sik Shim, Qing Ma | 2005-09-27 |
| 6943648 | Methods for forming a frequency bulk acoustic resonator with uniform frequency utilizing multiple trimming layers and structures formed thereby | Jose Maiz, Qing Ma, Valluri Rao | 2005-09-13 |
| 6940367 | Forming film bulk acoustic resonator filters | Qing Ma, Valluri Rao | 2005-09-06 |
| 6924717 | Tapered electrode in an acoustic resonator | Eyal Ginsburg, Alexander Talalyevsky, Eyal Bar-Sadeh, Doron Rubin | 2005-08-02 |
| 6903452 | Packaging microelectromechanical structures | Qing Ma, Valluri Rao, John Heck, Quan Tran | 2005-06-07 |
| 6861783 | Structure to achieve high-Q and low insertion loss film bulk acoustic resonators | Qing Ma, Valluri Rao | 2005-03-01 |
| 6822535 | Film bulk acoustic resonator structure and method of making | Qing Ma, Valluri Rao | 2004-11-23 |
| 6816035 | Forming film bulk acoustic resonator filters | Qing Ma, Valluri Rao | 2004-11-09 |
| 6812814 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, Valluri Rao, John Heck, Dong-sik Shim, Quan Tran | 2004-11-02 |
| 6787970 | Tuning of packaged film bulk acoustic resonator filters | Dong-sik Shim, Jose Maiz, Qing Ma, Valluri Rao | 2004-09-07 |
| 6686820 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, Valluri Rao, John Heck, Dong-sik Shim, Quan Tran | 2004-02-03 |
| 6673697 | Packaging microelectromechanical structures | Qing Ma, Valluri Rao, John Heck, Quan Tran | 2004-01-06 |
| 6662419 | Method for fabricating film bulk acoustic resonators to achieve high-Q and low loss | Qing Ma, Valluri Rao | 2003-12-16 |