Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7559242 | Silicon micromachined ultra-sensitive vibration spectrum sensor array (VSSA) | Li-Peng Wang, Qing Ma, Valluri Rao | 2009-07-14 |
| 7515045 | Wireless micro-electromechanical (MEMS) apparatus and method for real time characterization of motion parameters | Madhav Rangaswami, Devadas D. Pillai, Bimal Dey, Ralph M. Kling | 2009-04-07 |
| 6834549 | Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array | Emily Shu | 2004-12-28 |