Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9706632 | EUV light source and exposure apparatus | Qiang Wu, Liwan Yue | 2017-07-11 |
| 9665017 | Method for reducing contamination in extreme ultraviolet lithography light source | — | 2017-05-30 |
| 9176400 | System and method for reducing contamination in extreme ultraviolet lithography light source | — | 2015-11-03 |
| 9054021 | Transistors and fabrication method | Deyuan Xiao | 2015-06-09 |
| 9049774 | EUVL light source system and method | — | 2015-06-02 |
| 8929051 | Apparatus and method for holding a wafer | — | 2015-01-06 |
| 8917489 | Apparatus and method for holding a wafer | — | 2014-12-23 |
| 7759024 | Controlling shape of a reticle with low friction film coating at backside | George Chen | 2010-07-20 |
| 6978074 | Fiber optic sensors for gas turbine control | Louis Jacob Petrucco, Wolfgang Daum | 2005-12-20 |
| 6842227 | Fusion attachment of rigid pellicles and/or frames | — | 2005-01-11 |
| 6842228 | Fusion attachment of rigid pellicles and/or frames | — | 2005-01-11 |
| 6834549 | Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array | Goutam Paul | 2004-12-28 |
| 6599028 | Fiber optic sensors for gas turbine control | Dale M. Brown, Louis Jacob Petrucco, Jeffery A. Lovett, Wolfgang Daum, Robert J. Dunki-Jacobs | 2003-07-29 |
| 6486487 | Apparatus and method for measuring and selectively adjusting a clearance | Christopher Donald Johnson, Weiping Wang, Thomas Huei Hwang | 2002-11-26 |
| 6279400 | Apparatus and method for measuring and selectively adjusting a clearance | Christopher Donald Johnson, Weiping Wang, Thomas Huei Hwang | 2001-08-28 |
| 5978525 | Fiber optic sensors for gas turbine control | Dale M. Brown, Louis Jacob Petrucco, Jeffery A. Lovett, Wolfgang Daum, Robert J. Dunki-Jacobs | 1999-11-02 |
| 5936718 | Method for detecting fiber misalignment in composite manufacturing | Weiping Wang, Thomas Huei Hwang, Richard Alan Ridilla, Michael Evans Graham, Michael Kent Cueman +2 more | 1999-08-10 |
| 5608515 | Double window for protecting optical sensors from hazardous environments | Dale M. Brown, Louis Jacob Petrucco | 1997-03-04 |
| 5580741 | Chemiluminescence immunoassay for chlorinated aromatic compound detection | John Yupeng Gui, Donald R. Berdahl, Joseph James Salvo, Sandra F. Feldman | 1996-12-03 |
| 5569911 | Fiber optic system for remote fluorescent sensing using excitation and return fibers | Harold Woodruff Tomlinson, Jr., Sandra F. Feldman | 1996-10-29 |
| 5544478 | Optical sensing of combustion dynamics | Dale M. Brown | 1996-08-13 |
| 5290398 | Synthesis of tapers for fiber optic sensors | Sandra F. Feldman, John Yupeng Gui | 1994-03-01 |