| 9706632 |
EUV light source and exposure apparatus |
Qiang Wu, Liwan Yue |
2017-07-11 |
| 9665017 |
Method for reducing contamination in extreme ultraviolet lithography light source |
— |
2017-05-30 |
| 9176400 |
System and method for reducing contamination in extreme ultraviolet lithography light source |
— |
2015-11-03 |
| 9054021 |
Transistors and fabrication method |
Deyuan Xiao |
2015-06-09 |
| 9049774 |
EUVL light source system and method |
— |
2015-06-02 |
| 8929051 |
Apparatus and method for holding a wafer |
— |
2015-01-06 |
| 8917489 |
Apparatus and method for holding a wafer |
— |
2014-12-23 |
| 7759024 |
Controlling shape of a reticle with low friction film coating at backside |
George Chen |
2010-07-20 |
| 6978074 |
Fiber optic sensors for gas turbine control |
Louis Jacob Petrucco, Wolfgang Daum |
2005-12-20 |
| 6842227 |
Fusion attachment of rigid pellicles and/or frames |
— |
2005-01-11 |
| 6842228 |
Fusion attachment of rigid pellicles and/or frames |
— |
2005-01-11 |
| 6834549 |
Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array |
Goutam Paul |
2004-12-28 |
| 6599028 |
Fiber optic sensors for gas turbine control |
Dale M. Brown, Louis Jacob Petrucco, Jeffery A. Lovett, Wolfgang Daum, Robert J. Dunki-Jacobs |
2003-07-29 |
| 6486487 |
Apparatus and method for measuring and selectively adjusting a clearance |
Christopher Donald Johnson, Weiping Wang, Thomas Huei Hwang |
2002-11-26 |
| 6279400 |
Apparatus and method for measuring and selectively adjusting a clearance |
Christopher Donald Johnson, Weiping Wang, Thomas Huei Hwang |
2001-08-28 |
| 5978525 |
Fiber optic sensors for gas turbine control |
Dale M. Brown, Louis Jacob Petrucco, Jeffery A. Lovett, Wolfgang Daum, Robert J. Dunki-Jacobs |
1999-11-02 |
| 5936718 |
Method for detecting fiber misalignment in composite manufacturing |
Weiping Wang, Thomas Huei Hwang, Richard Alan Ridilla, Michael Evans Graham, Michael Kent Cueman +2 more |
1999-08-10 |
| 5608515 |
Double window for protecting optical sensors from hazardous environments |
Dale M. Brown, Louis Jacob Petrucco |
1997-03-04 |
| 5580741 |
Chemiluminescence immunoassay for chlorinated aromatic compound detection |
John Yupeng Gui, Donald R. Berdahl, Joseph James Salvo, Sandra F. Feldman |
1996-12-03 |
| 5569911 |
Fiber optic system for remote fluorescent sensing using excitation and return fibers |
Harold Woodruff Tomlinson, Jr., Sandra F. Feldman |
1996-10-29 |
| 5544478 |
Optical sensing of combustion dynamics |
Dale M. Brown |
1996-08-13 |
| 5290398 |
Synthesis of tapers for fiber optic sensors |
Sandra F. Feldman, John Yupeng Gui |
1994-03-01 |
