Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10613307 | Integrated rotary structure and fabrication method thereof | Qiang Wu | 2020-04-07 |
| 10553470 | Wafer alignment method and apparatus for overlay measurement | Qiang Wu | 2020-02-04 |
| 10187964 | Calibrating apparatus and method | Qiang Wu | 2019-01-22 |
| 10042269 | Apparatus and method for overlay measurement | Qiang Wu, Yang Liu | 2018-08-07 |
| 9992857 | Light source and photolithography apparatus containing the same, calibrating apparatus and method | Qiang Wu | 2018-06-05 |
| 9927601 | Extreme ultraviolet light source, exposure apparatus, and integrated rotary structure fabricating method | Qiang Wu | 2018-03-27 |
| 9835956 | Apparatus and method for overlay measurement | Yang Liu, Qiang Wu | 2017-12-05 |
| 9706632 | EUV light source and exposure apparatus | Qiang Wu, Emily Shu | 2017-07-11 |
| 9332626 | EUV light source and exposure apparatus | Qiang Wu | 2016-05-03 |