Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272530 | Ultra-large area scanning reactive ion etching machine and etching method thereof | Xiangang Luo, Zeyu Zhao, Ping Gao, Xiaoliang Ma, Mingbo Pu +2 more | 2025-04-08 |
| 12174322 | F-P sensor probe, absolute distance measurement device, and absolute distance measurement method | Xiangang Luo, Tiancheng Gong, Chengwei Zhao, Guiyuan Jia, Yanwu Chu +1 more | 2024-12-24 |
| 12078937 | Near-field lithography immersion system, immersion unit and interface module thereof | Xiangang Luo, Chengwei Zhao, Changtao WANG, Zeyu Zhao, Yunfei Luo +2 more | 2024-09-03 |
| 11766665 | Method for efficiently synthesizing primary amines | Wanjun GUO, Shuang Xiang, Xiaohui Liu, Yong Guo | 2023-09-26 |
| 11693320 | Secondary imaging optical lithography method and apparatus | Xiangang Luo, Changtao WANG, Weijie Kong, Ping Gao, Zeyu Zhao | 2023-07-04 |
| 11384036 | Method for preparing aromatic hydrocarbons by hydrocracking polymer containing aromatic ring | Yaxuan Jing, Yong Guo, Xiaohui Liu, Ning YAN | 2022-07-12 |
| 11061330 | Methods and apparatuses for coating photoresist | Xiangang Luo, Zeyu Zhao, Mingbo Pu, Ping Gao, Xiaoliang Ma +2 more | 2021-07-13 |
| 9958784 | Super-resolution imaging photolithography | Xiangang Luo, Changtao WANG, Zeyu Zhao, Mingbo Pu, Na YAO +14 more | 2018-05-01 |