Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174322 | F-P sensor probe, absolute distance measurement device, and absolute distance measurement method | Xiangang Luo, Tiancheng Gong, Chengwei Zhao, Yanqin WANG, Guiyuan Jia +1 more | 2024-12-24 |
| 12100188 | Template mark detection method and template position correction method based on single camera | Xiangang Luo, Chengwenli Li, Minggang Liu, Jian Yan | 2024-09-24 |
| 12085846 | Method for inverse optical proximity correction of super-resolution lithography based on level set algorithm | Xiangang Luo, Weijie Kong, Xiangzhi Liu, Ge Yin | 2024-09-10 |
| 12078937 | Near-field lithography immersion system, immersion unit and interface module thereof | Xiangang Luo, Chengwei Zhao, Yanqin WANG, Zeyu Zhao, Yunfei Luo +2 more | 2024-09-03 |
| 11693320 | Secondary imaging optical lithography method and apparatus | Xiangang Luo, Yanqin WANG, Weijie Kong, Ping Gao, Zeyu Zhao | 2023-07-04 |
| 9958784 | Super-resolution imaging photolithography | Xiangang Luo, Zeyu Zhao, Yanqin WANG, Mingbo Pu, Na YAO +14 more | 2018-05-01 |