Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12306424 | Metasurface-based imaging system, design method, and detector | Xiangang Luo, Fei Zhang, Ting Xie, Xiaoliang Ma | 2025-05-20 |
| 12272530 | Ultra-large area scanning reactive ion etching machine and etching method thereof | Xiangang Luo, Zeyu Zhao, Yanqin WANG, Ping Gao, Xiaoliang Ma +2 more | 2025-04-08 |
| 12228710 | Ultra-wide angle broadband polarization imaging system based on metasurface, and detection apparatus | Xiangang Luo, Ting Xie, Fei Zhang, Xiaoliang Ma | 2025-02-18 |
| 12092960 | Mask topology optimization method and system for surface plasmon near-field photolithography | Xiangang Luo, Mingfeng Xu, Di Sang, Xiaoliang Ma, Xiong Li +2 more | 2024-09-17 |
| 12078937 | Near-field lithography immersion system, immersion unit and interface module thereof | Xiangang Luo, Chengwei Zhao, Yanqin WANG, Changtao WANG, Zeyu Zhao +2 more | 2024-09-03 |
| 11868055 | Multifunctional lithography device | Xiangang Luo, Xiaoliang Ma, Ping Gao, Xiong Li | 2024-01-09 |
| 11754352 | Visible light-transparent and radiative-cooling multilayer film | Xiangang Luo, Xiaoliang Ma, Xiong Li, Yinghui Guo | 2023-09-12 |
| 11724962 | Method for etching curved substrate | Xiangang Luo, Xiong Li, Xiaoliang Ma, Kaipeng Liu, Zeyu Zhao | 2023-08-15 |
| 11714358 | Intelligent correction device control system for super-resolution lithography precision mask | Xiangang Luo, Ping Gao, Xiaoliang Ma, Xiong Li | 2023-08-01 |
| 11675273 | Method of fabricating micro-nano structure | Xiangang Luo, Yinghui Guo, Xiong Li, Xiaoliang Ma, Ping Gao | 2023-06-13 |
| 11592602 | Sub-wavelength structural material having patch type array and compatibility of low detectability for infrared, laser, and microwave | Xiangang Luo, Xiong Li, Xiaoliang Ma, Guoqing Paul Shen | 2023-02-28 |
| 11061330 | Methods and apparatuses for coating photoresist | Xiangang Luo, Yanqin WANG, Zeyu Zhao, Ping Gao, Xiaoliang Ma +2 more | 2021-07-13 |
| 9958784 | Super-resolution imaging photolithography | Xiangang Luo, Changtao WANG, Zeyu Zhao, Yanqin WANG, Na YAO +14 more | 2018-05-01 |