Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9179221 | MEMS devices, interface circuits, and methods of making thereof | Stefan Barzen, Andreas Wiesbauer, Christian Jenkner | 2015-11-03 |
| 9090453 | Sensor module and semiconductor chip | Alfons Dehe | 2015-07-28 |
| 8604566 | Sensor module and semiconductor chip | Alfons Dehe | 2013-12-10 |
| 8542853 | Sound transducer structure and method for manufacturing a sound transducer structure | Alfons Dehe, Stefan Barzen | 2013-09-24 |
| 8428286 | MEMS microphone packaging and MEMS microphone module | Martin Wurzer, Alfons Dehe | 2013-04-23 |
| 7994618 | Sensor module and method for manufacturing same | Alfons Dehe | 2011-08-09 |
| 7912236 | Sound transducer structure and method for manufacturing a sound transducer structure | Alfons Dehe, Stefan Barzen | 2011-03-22 |
| 7882612 | Method for producing a membrane | Alfons Dehe, Stefan Barzen | 2011-02-08 |
| 7502482 | Membrane and method for the production of the same | Alfons Dehe, Stefan Barzen | 2009-03-10 |
| 7473572 | Micromechanical sensors and methods of manufacturing same | Alfons Dehe | 2009-01-06 |
| 7348646 | Micromechanical capacitive transducer and method for manufacturing the same | Stefan Barzen, Alfons Dehe | 2008-03-25 |
| 7190038 | Micromechanical sensors and methods of manufacturing same | Alfons Dehe | 2007-03-13 |