Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635567 | Method of producing alignment marks | Eva Ebertseder, Matthias Lehr, Torsten Werneke, Jürgen Pahlitzsch | 2003-10-21 |
| 5866485 | Techniques for etching a silicon dioxide-containing layer | Markus Kirchhoff | 1999-02-02 |