Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6556418 | Micromechanical component and process for its fabrication | Robert Aigner, Klaus-Gunter Oppermann | 2003-04-29 |
| 6406933 | Production method for micromechanical components | Robert Aigner, Klaus-Gunter Oppermann | 2002-06-18 |
| 6401544 | Micromechanical component protected from environmental influences | Robert Aigner, Christofer Hierold, Stefan Kolb, Dieter Maier-Schneider, Klaus-Gunter Oppermann +3 more | 2002-06-11 |
| 6346429 | Method for fabricating integrated sensors | Robert Aigner, Andreas Meckes, Klaus-Gunter Oppermann | 2002-02-12 |
| 6094985 | Rotation rate sensor | Christofer Hierold, Max Steger, Thomas Scheiter, Reinhold Noe, Ulrich Naher | 2000-08-01 |