Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7692317 | Apparatus for housing a micromechanical structure | Martin Franosch, Andreas Meckes, Winfried Nessler | 2010-04-06 |
| 7300823 | Apparatus for housing a micromechanical structure and method for producing the same | Martin Franosch, Andreas Meckes, Winfried Nessler | 2007-11-27 |
| 7234237 | Method for producing a protective cover for a device | Martin Franosch, Andreas Meckes | 2007-06-26 |
| 6955950 | Method for generating a protective cover for a device | Robert Aigner, Martin Franosch, Andreas Meckes, Marc Strasser | 2005-10-18 |
| 6939734 | Method for producing a protective cover for a device | Martin Franosch, Andreas Meckes | 2005-09-06 |
| 6762455 | Semiconductor component for high reverse voltages in conjunction with a low on resistance and method for fabricating a semiconductor component | Jeno Tihanyi | 2004-07-13 |
| 6724058 | Method for producing a filled recess in a material layer, and an integrated circuit configuration produced by the method | Robert Aigner | 2004-04-20 |
| 6556418 | Micromechanical component and process for its fabrication | Robert Aigner, Hergen Kapels | 2003-04-29 |
| 6406933 | Production method for micromechanical components | Robert Aigner, Hergen Kapels | 2002-06-18 |
| 6401544 | Micromechanical component protected from environmental influences | Robert Aigner, Christofer Hierold, Hergen Kapels, Stefan Kolb, Dieter Maier-Schneider +3 more | 2002-06-11 |
| 6373115 | Micromechanical structure, sensor and method for manufacturing the same | Stefan Kolb, Dieter Maier-Schneider, Hans-Jörg Timme | 2002-04-16 |
| 6346429 | Method for fabricating integrated sensors | Robert Aigner, Hergen Kapels, Andreas Meckes | 2002-02-12 |
| 5994751 | Photodiode having reduced series resistance, and method for fabrication thereof | — | 1999-11-30 |
| 4703663 | Force sensor for electrical measuring of forces, torques, acceleration pressures and mechanical stresses | — | 1987-11-03 |