Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387081 | Wafer chuck and processing arrangement | Rudolf Kogler, Juergen Steinbrenner, Wolfgang Dastel, Markus Kahn | 2022-07-12 |
| 10629416 | Wafer chuck and processing arrangement | Rudolf Kogler, Juergen Steinbrenner, Wolfgang Dastel, Markus Kahn | 2020-04-21 |
| 9455136 | Controlling the reflow behaviour of BPSG films and devices made thereof | Juergen Steinbrenner, Markus Kahn, Helmut Schoenherr, Ravi Keshav Joshi, Heimo Hofer +1 more | 2016-09-27 |