Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387081 | Wafer chuck and processing arrangement | Rudolf Kogler, Juergen Steinbrenner, Harald Huetter, Markus Kahn | 2022-07-12 |
| 10629416 | Wafer chuck and processing arrangement | Rudolf Kogler, Juergen Steinbrenner, Harald Huetter, Markus Kahn | 2020-04-21 |