Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8493546 | Plasma as a band pass filter for photo lithography | — | 2013-07-23 |
| 7291569 | Fluids for immersion lithography systems | Stefan Brandl, Brian Martinick | 2007-11-06 |
| 7286205 | Closing disk for immersion head | — | 2007-10-23 |
| 7279258 | Method and arrangement for controlling focus parameters of an exposure tool | — | 2007-10-09 |
| 6948149 | Method of determining the overlay accuracy of multiple patterns formed on a semiconductor wafer | — | 2005-09-20 |
| 6927462 | Method of forming a gate contact in a semiconductor device | Jonathan Philip Davis, Michael Rennie | 2005-08-09 |
| 4769853 | High dynamic range fiber optical link | Gordon R. Orme, Peter G. Petrelis | 1988-09-06 |
| 4725844 | Fiber optical discrete phase modulation system | Gordon R. Orme, Peter G. Petrelis | 1988-02-16 |