Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7150946 | Method for the repair of defects in photolithographic masks for patterning semiconductor wafers | Steffen Schulze | 2006-12-19 |
| 6888260 | Alignment or overlay marks for semiconductor processing | Shoaib Zaidi | 2005-05-03 |
| 6801314 | Alignment system and method using bright spot and box structure | Bernhard R. Liegl, Peter Thwaite | 2004-10-05 |
| 6784070 | Intra-cell mask alignment for improved overlay | Bernhard R. Liegl | 2004-08-31 |
| 6767674 | Method for obtaining elliptical and rounded shapes using beam shaping | — | 2004-07-27 |
| 6368516 | Semiconductor manufacturing methods | Steffen Schulze | 2002-04-09 |
| 6114074 | Extrusion enhanced mask for improving process window | Shahid Butt | 2000-09-05 |