Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6328041 | Universal cleaning wafer for a plasma chamber | Jeffrey J. Brown, Christopher N. Collins, George A. Kaplita, Stefan Schmitz, Len Yuan Tsou | 2001-12-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6328041 | Universal cleaning wafer for a plasma chamber | Jeffrey J. Brown, Christopher N. Collins, George A. Kaplita, Stefan Schmitz, Len Yuan Tsou | 2001-12-11 |