Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475291 | Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers | Leslie Jane Bohnenkamp, Michael Buet | 2002-11-05 |
| 6273992 | Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers | Leslie Jane Bohnenkamp, Michael Buet | 2001-08-14 |
| 6053984 | Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers | Leslie Jane Bohnenkamp, Michael Buet | 2000-04-25 |
| 5569328 | Silicon semiconductor wafer test | Michael Buet | 1996-10-29 |
| 5481881 | System and process for removing potential pollutants from a vapor stream | Michael Buet | 1996-01-09 |
| 4362611 | Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield | Joseph S. Logan, Cornel Rosu | 1982-12-07 |
| 4278493 | Method for cleaning surfaces by ion milling | — | 1981-07-14 |
| 4248688 | Ion milling of thin metal films | Helmut M. Gartner, Homi G. Sarkary, Randolph H. Schnitzel | 1981-02-03 |