Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4362611 | Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield | Joseph S. Logan, Steve I. Petvai | 1982-12-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4362611 | Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield | Joseph S. Logan, Steve I. Petvai | 1982-12-07 |