Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7521172 | Topcoat material and use thereof in immersion lithography processes | Robert Allen David, Phillip Brock, Sean D. Burns, Dario L. Goldfarb, David R. Medeiros +3 more | 2009-04-21 |