Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7525651 | Inspection apparatus and inspection method for pattern profile, and exposure apparatus | Mitsuru Uda, Akira Susuki, Chiaki Oishi, Yasuharu Yamada, Teruhiko Havano | 2009-04-28 |
| 7310141 | Inspection device and inspection method for pattern profile, exposure system | Mitsuru Uda, Akira Suzuki, Chiaki Oishi, Yasuharu Yamada, Teruhiko Hayano | 2007-12-18 |