AS

Akira Susuki

IBM: 1 patents #44,794 of 70,183Top 65%
Overall (All Time): #3,324,009 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7525651 Inspection apparatus and inspection method for pattern profile, and exposure apparatus Mitsuru Uda, Kazunari Terakawa, Chiaki Oishi, Yasuharu Yamada, Teruhiko Havano 2009-04-28