Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7525651 | Inspection apparatus and inspection method for pattern profile, and exposure apparatus | Mitsuru Uda, Kazunari Terakawa, Chiaki Oishi, Yasuharu Yamada, Teruhiko Havano | 2009-04-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7525651 | Inspection apparatus and inspection method for pattern profile, and exposure apparatus | Mitsuru Uda, Kazunari Terakawa, Chiaki Oishi, Yasuharu Yamada, Teruhiko Havano | 2009-04-28 |