Issued Patents All Time
Showing 51–51 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4340461 | Modified RIE chamber for uniform silicon etching | Charles J. Hendricks, William W. Hicks | 1982-07-20 |
Showing 51–51 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4340461 | Modified RIE chamber for uniform silicon etching | Charles J. Hendricks, William W. Hicks | 1982-07-20 |