Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7810033 | Methods and systems involving text analysis | Steven A. Cordes, Debra A. Loussedes, Patrick R. Varekamp | 2010-10-05 | $4,341,000 |
| 6429667 | Electrically testable process window monitor for lithographic processing | Christopher P. Ausschnitt | 2002-08-06 | $5,918,000 |
| 6176967 | Reactive ion etch chamber wafer masking system | — | 2001-01-23 | $22,404,000 |
| 6163367 | Apparatus and method for in-situ adjustment of light transmission in a photolithography process | — | 2000-12-19 | $38,646,000 |
| 6127686 | Thin resist process by sub-threshold exposure | — | 2000-10-03 | $31,821,000 |
| 5905019 | Thin resist process by sub-threshold exposure | — | 1999-05-18 | $41,093,000 |