Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Thin resist process by sub-threshold exposure

Thin resist process by sub-threshold exposure

US Patent 6127686 · Granted Oct 3, 2000

Estimated economic value: $31,821,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and systems involving text analysis2010
Electrically testable process window monitor for lithographic processing2002
Reactive ion etch chamber wafer masking system2001
Apparatus and method for in-situ adjustment of light transmission in a photolith2000
Thin resist process by sub-threshold exposure1999