Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5286331 | Supersonic molecular beam etching of surfaces | Lee Chen, Shwu-Jen Jeng, Wesley C. Natzle | 1994-02-15 |
| 5282925 | Device and method for accurate etching and removal of thin film | Shwu-Jen Jeng, Wesley C. Natzle | 1994-02-01 |