Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7090963 | Process for forming features of 50 nm or less half-pitch with chemically amplified resist imaging | David R. Medeiros, Wu-Song Huang, Gregory Michael Wallraff, Frances Anne Houle | 2006-08-15 |