Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5863619 | Method of and apparatus for coating photoresist film | — | 1999-01-26 |
| 5583069 | Method for making a fine annular charge storage electrode in a semiconductor device using a phase-shift mask | Chang Nam Ahn, Hung-Eil Kim, Seung Chan Moon, Il Ho Lee | 1996-12-10 |