Issued Patents All Time
Showing 51–63 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6378292 | MEMS microthruster array | — | 2002-04-30 |
| 6246305 | Apparatus and method for operating a micromechanical switch | Jeffrey A. Ridley | 2001-06-12 |
| 6126140 | Monolithic bi-directional microvalve with enclosed drive electric field | Burgess R. Johnson, S. Roy Kimura | 2000-10-03 |
| 6040749 | Apparatus and method for operating a micromechanical switch | Jeffrey A. Ridley | 2000-03-21 |
| 6031944 | High temperature resonant integrated microstructure sensor | — | 2000-02-29 |
| 6025914 | Cathode seal including migration resistant dielectric material | Carol M. Ford, J. David Zook | 2000-02-15 |
| 5959338 | Micro electro-mechanical systems relay | Burgess R. Johnson | 1999-09-28 |
| 5567650 | Method of forming tapered plug-filled via in electrical interconnection | John B. Straight, James C. Anderson | 1996-10-22 |
| 5280894 | Fixture for backside wafer etching | William Witcraft | 1994-01-25 |
| 5211816 | Vacuum distillation apparatus for removal of volatile impurities from liquids | — | 1993-05-18 |
| 4679308 | Process for controlling mobile ion contamination in semiconductor devices | Chris Finn | 1987-07-14 |
| 4642162 | Planarization of dielectric layers in integrated circuits | David J. Brownell, Daniel Christensen, David G. Erie | 1987-02-10 |
| 4445966 | Method of plasma etching of films containing chromium | Robert J. Carlson | 1984-05-01 |