Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5815396 | Vacuum processing device and film forming device and method using same | Hideaki Shimamura, Yuji Yoneoka, Shigeru Kobayashi, Satosi Kisimoto, Sunao Matsubara +6 more | 1998-09-29 |
| 5707500 | Vacuum processing equipment, film coating equipment and deposition method | Hideaki Shimamura, Yuji Yoneoka, Shigeru Kobayashi, Satosi Kisimoto, Sunao Matsubara +6 more | 1998-01-13 |