Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7572335 | Crystallization apparatus and crystallization method | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2009-08-11 |
| 7556993 | Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus | Mutsuko Hatano, Shinya Yamaguchi, Seong-Kee Park | 2009-07-07 |
| 7537660 | Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2009-05-26 |
| 7531853 | Semiconductor device and manufacturing method of the same | Shinichi Saito, Digh Hisamoto, Nobuyuki Sugii, Ryuta Tsuchiya | 2009-05-12 |
| 7518252 | Thin-film semiconductor substrate, method of manufacturing thin-film semiconductor substrate, method of crystallization, apparatus for crystallization, thin-film semiconductor device, and method of manufacturing thin-film semiconductor device | Masato Hiramatsu, Hiroyuki Ogawa, Masayuki Jyumonji, Masakiyo Matsumura | 2009-04-14 |
| 7505204 | Crystallization apparatus, crystallization method, and phase shifter | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2009-03-17 |
| 7491972 | Polysilicon semiconductor thin film substrate, method for producing the same, semiconductor device, and electronic device | Takahiro Kamo, Yoshiyuki Kaneko | 2009-02-17 |
| 7491264 | Oxygen concentrating apparatus | Shinichi Tao, Satoshi Inomoto | 2009-02-17 |
| 7436046 | Semiconductor device and manufacturing method of the same | Masao Kondo, Nobuyuki Sugii | 2008-10-14 |
| 7413604 | Process for producing polysilicon film | Kazuo Takeda, Masakazu Saito, Yukio Takasaki, Hironobu Abe, Makoto Ohkura +1 more | 2008-08-19 |
| 7413608 | Crystallization apparatus, crystallization method, and phase shifter | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2008-08-19 |
| 7410848 | Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus | Masayuki Jyumonji, Hiroyuki Ogawa, Masakiyo Matsumura, Masato Hiramatsu, Yukio Taniguchi +1 more | 2008-08-12 |
| 7350524 | Liquid-applying device | Takatoshi Saito | 2008-04-01 |
| 7352002 | Semiconductor device including semiconductor thin films having different crystallinity, substrate of the same, and manufacturing method of the same, and liquid crystal display and manufacturing method of the same | Masakiyo Matsumura, Yoshitaka Yamamoto, Mikihiko Nishitani, Masato Hiramatsu, Masayuki Jyumonji +1 more | 2008-04-01 |
| 7335261 | Apparatus for forming a semiconductor thin film | Masakiyo Matsumura, Mikihiko Nishitani, Masayuki Jyumonji, Yukio Taniguchi, Masato Hiramatsu +1 more | 2008-02-26 |
| 7227186 | Thin film transistor and method of manufacturing the same | Takuo Tamura, Kiyoshi Ogata, Yoichi Takahara, Kazuhiko Horikoshi, Hironaru Yamaguchi +4 more | 2007-06-05 |
| 7186602 | Laser annealing method | Masayuki Jyumonji, Masakiyo Matsumura, Mikihiko Nishitani, Masato Hiramatsu, Yukio Taniguchi +2 more | 2007-03-06 |
| 7172841 | Crystallization apparatus, crystallization method, and phase shift mask | Yukio Taniguchi, Masakiyo Matsumura | 2007-02-06 |
| 7172932 | Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus | Mutsuko Hatano, Shinya Yamaguchi, Seong-Kee Park | 2007-02-06 |
| 7118946 | Thin film transistor, circuit device and liquid crystal display | Masato Hiramatsu, Masakiyo Matsumura, Mikihiko Nishitani, Yoshitaka Yamamoto | 2006-10-10 |
| 7115454 | Thin film semiconductor device, polycrystalline semiconductor thin film production and process and production apparatus | Mutsuko Hatano, Shinya Yamaguchi, Seong-Kee Park | 2006-10-03 |
| 7105419 | Thin-film semiconductor substrate, method of manufacturing thin-film semiconductor substrate, method of crystallization, apparatus for crystallization, thin-film semiconductor device, and method of manufacturing thin-film semiconductor device | Masato Hiramatsu, Hiroyuki Ogawa, Masayuki Jyumonji, Masakiyo Matsumura | 2006-09-12 |
| 7101436 | Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2006-09-05 |
| 7087505 | Semiconductor device including semiconductor thin films having different crystallinity, substrate of the same, and manufacturing method of the same, and liquid crystal display and manufacturing method of the same | Masakiyo Matsumura, Yoshitaka Yamamoto, Mikihiko Nishitani, Masato Hiramatsu, Masayuki Jyumonji +1 more | 2006-08-08 |
| 7056626 | Crystallization apparatus, crystallization method, thin film transistor and display apparatus | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2006-06-06 |