Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8183122 | Semiconductor device including semiconductor thin film, which is subjected to heat treatment to have alignment mark, crystallizing method for the semiconductor thin film, and crystallizing apparatus for the semiconductor thin film | Hiroyuki Ogawa, Noritaka Akita, Yukio Taniguchi, Masato Hiramatsu, Masakiyo Matsumura | 2012-05-22 |
| 8114217 | Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus | Hiroyuki Ogawa, Masakiyo Matsumura, Masato Hiramatsu, Yoshinobu Kimura, Yukio Taniguchi +1 more | 2012-02-14 |
| 7833349 | Phase shifter for laser annealing | — | 2010-11-16 |
| 7692864 | Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2010-04-06 |
| 7575834 | Phase shifter for laser annealing | — | 2009-08-18 |
| 7572335 | Crystallization apparatus and crystallization method | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2009-08-11 |
| 7550694 | Laser anneal apparatus | Yukio Taniguchi, Masakiyo Matsumura, Masato Hiramatsu, Yoshio Takami | 2009-06-23 |
| 7537660 | Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2009-05-26 |
| 7518252 | Thin-film semiconductor substrate, method of manufacturing thin-film semiconductor substrate, method of crystallization, apparatus for crystallization, thin-film semiconductor device, and method of manufacturing thin-film semiconductor device | Masato Hiramatsu, Yoshinobu Kimura, Hiroyuki Ogawa, Masakiyo Matsumura | 2009-04-14 |
| 7505204 | Crystallization apparatus, crystallization method, and phase shifter | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2009-03-17 |
| 7499147 | Generation method of light intensity distribution, generation apparatus of light intensity distribution, and light modulation element assembly | Yukio Taniguchi, Hiroyuki Ogawa, Noritaka Akita, Masakiyo Matsumura | 2009-03-03 |
| 7445674 | Crystallization apparatus, crystallization method, device, optical modulation element, and display apparatus | Yukio Taniguchi, Hiroyuki Ogawa | 2008-11-04 |
| 7413608 | Crystallization apparatus, crystallization method, and phase shifter | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2008-08-19 |
| 7410848 | Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus | Hiroyuki Ogawa, Masakiyo Matsumura, Masato Hiramatsu, Yoshinobu Kimura, Yukio Taniguchi +1 more | 2008-08-12 |
| 7405141 | Processing method, processing apparatus, crystallization method and crystallization apparatus using pulsed laser beam | Hiroyuki Ogawa, Masato Hiramatsu, Noritaka Akita, Tomoya Kato | 2008-07-29 |
| 7352002 | Semiconductor device including semiconductor thin films having different crystallinity, substrate of the same, and manufacturing method of the same, and liquid crystal display and manufacturing method of the same | Yoshinobu Kimura, Masakiyo Matsumura, Yoshitaka Yamamoto, Mikihiko Nishitani, Masato Hiramatsu +1 more | 2008-04-01 |
| 7335261 | Apparatus for forming a semiconductor thin film | Masakiyo Matsumura, Mikihiko Nishitani, Yoshinobu Kimura, Yukio Taniguchi, Masato Hiramatsu +1 more | 2008-02-26 |
| 7247813 | Crystallization apparatus using pulsed laser beam | Hiroyuki Ogawa, Masato Hiramatsu, Noritaka Akita, Tomoya Kato | 2007-07-24 |
| 7241702 | Processing method for annealing and doping a semiconductor | — | 2007-07-10 |
| 7186602 | Laser annealing method | Masakiyo Matsumura, Yoshinobu Kimura, Mikihiko Nishitani, Masato Hiramatsu, Yukio Taniguchi +2 more | 2007-03-06 |
| 7157677 | Method of picking up sectional image of laser light | Masakiyo Matsumura, Yukio Taniguchi, Masato Hiramatsu, Hiroyuki Ogawa, Noritaka Akita | 2007-01-02 |
| 7105419 | Thin-film semiconductor substrate, method of manufacturing thin-film semiconductor substrate, method of crystallization, apparatus for crystallization, thin-film semiconductor device, and method of manufacturing thin-film semiconductor device | Masato Hiramatsu, Yoshinobu Kimura, Hiroyuki Ogawa, Masakiyo Matsumura | 2006-09-12 |
| 7101436 | Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2006-09-05 |
| 7087505 | Semiconductor device including semiconductor thin films having different crystallinity, substrate of the same, and manufacturing method of the same, and liquid crystal display and manufacturing method of the same | Yoshinobu Kimura, Masakiyo Matsumura, Yoshitaka Yamamoto, Mikihiko Nishitani, Masato Hiramatsu +1 more | 2006-08-08 |
| 7056626 | Crystallization apparatus, crystallization method, thin film transistor and display apparatus | Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa +1 more | 2006-06-06 |