Issued Patents All Time
Showing 201–203 of 203 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4526643 | Dry etching apparatus using reactive ions | Haruo Okano, Yasuhiro Horiike, Hiromichi Horie | 1985-07-02 |
| 4442338 | Plasma etching apparatus | — | 1984-04-10 |
| 4341593 | Plasma etching method for aluminum-based films | Tetuo Kurisaki, Yasuhiro Horiike | 1982-07-27 |