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Semiconductor integrated circuitry and method for manufacturing the circuitry |
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2004-07-13 |
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Semiconductor integrated circuitry and method for manufacturing the circuitry |
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Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing |
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Method of manufacturing semiconductor devices |
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Method of manufacturing semiconductor devices |
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2001-09-11 |
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Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same |
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