Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5250812 | Electron beam lithography using an aperture having an array of repeated unit patterns | Fumio Murai, Shinji Okazaki, Haruo Yoda, Yukinobu Shibata | 1993-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5250812 | Electron beam lithography using an aperture having an array of repeated unit patterns | Fumio Murai, Shinji Okazaki, Haruo Yoda, Yukinobu Shibata | 1993-10-05 |