Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8610060 | Charged particle beam device | Suyo Asai, Tsuyoshi Onishi | 2013-12-17 |
| 8581219 | Composite charged-particle-beam apparatus | Tsunenori Nomaguchi | 2013-11-12 |
| 8455820 | Composite charged particle beams apparatus | Tsunenori Nomaguchi | 2013-06-04 |
| 8304723 | Defect inspection and charged particle beam apparatus | Mitsugu Sato | 2012-11-06 |
| 8026491 | Charged particle beam apparatus and method for charged particle beam adjustment | Takeshi Ogashiwa, Mitsugu Sato, Atsushi Takane, Yuusuke Narita, Takeharu Shichiji +3 more | 2011-09-27 |
| 7705303 | Defect inspection and charged particle beam apparatus | Mitsugu Sato | 2010-04-27 |
| 7615765 | Charged particle beam apparatus | Souichi Katagiri, Takashi Ohshima, Mitsugu Sato | 2009-11-10 |
| 7582885 | Charged particle beam apparatus | Souichi Katagiri, Takashi Ohshima, Mitsugu Sato, Takashi Furukawa | 2009-09-01 |
| 7550724 | Electron beam device and its control method | Takashi Ichimura, Takeshi Ogashiwa, Kenji Aoki | 2009-06-23 |
| 7348559 | Defect inspection and charged particle beam apparatus | Mitsugu Sato | 2008-03-25 |
| 7112792 | Defect inspection and charged particle beam apparatus | Mitsugu Sato | 2006-09-26 |