Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355815 | Electron microscope and electron beam detector | Shin Imamura, Takashi Ohshima, Yoichi Ose | 2016-05-31 |
| 7365323 | Environmental scanning electron microcope | Tomohisa Ohtaki, Ryoichi Ishii, Haruhisa Takahata | 2008-04-29 |
| 7274017 | Electron beam apparatus and high-voltage discharge prevention method | Akimitsu Okura, Masashi Kimura, Yoshihiko Nakayama | 2007-09-25 |
| 6949752 | Electron beam apparatus and high-voltage discharge prevention method | Akimitsu Okura, Masashi Kimura, Yoshihiko Nakayama | 2005-09-27 |
| 5047647 | Electron beam lithography apparatus | Hiroyuki Itoh | 1991-09-10 |