Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10636620 | Charged particle beam device and control method of charged particle beam device | Hiroshi Kobayashi, Norio Sato | 2020-04-28 |
| 8168950 | Charged particle beam apparatus, and image generation method with charged particle beam apparatus | Kanji Furuhashi, Shuji Kikuchi, Yasuhiro Gunji | 2012-05-01 |
| 7916926 | Semiconductor inspection apparatus | Hidemitsu Naya, Takuya Shirato | 2011-03-29 |